Invention Grant
US08324644B2 Optical functional element, optical functional element array, exposure device, and method of manufacturing optical functional element
有权
光学功能元件，光学功能元件阵列，曝光装置以及光学功能元件的制造方法
- Patent Title: Optical functional element, optical functional element array, exposure device, and method of manufacturing optical functional element
- Patent Title (中): 光学功能元件，光学功能元件阵列，曝光装置以及光学功能元件的制造方法
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Application No.: US12726869Application Date: 2010-03-18
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Publication No.: US08324644B2Publication Date: 2012-12-04
- Inventor: Teiichi Suzuki , Hideki Fukunaga , Akira Fujii , Takashi Fujimoto
- Applicant: Teiichi Suzuki , Hideki Fukunaga , Akira Fujii , Takashi Fujimoto
- Applicant Address: JP Tokyo
- Assignee: Fuji Xerox Co., Ltd.
- Current Assignee: Fuji Xerox Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2009-211726 20090914
- Main IPC: H01L29/22
- IPC: H01L29/22 ; H01L29/16
Abstract:
According to an aspect of the invention, an optical functional element includes a substrate, a semiconductor element portion, and a light emitting element portion. The semiconductor element portion includes a first part of a semiconductor multi layer structure formed on the substrate. The light emitting element portion includes a second part of the semiconductor multi layer structure and light emitting element structure formed on the second part of the semiconductor multi layer structure.
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