Invention Grant
- Patent Title: Moisture sensor and method for measuring moisture of a gas-phase medium
- Patent Title (中): 湿度传感器及气相介质湿度测定方法
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Application No.: US12594510Application Date: 2008-04-02
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Publication No.: US08324913B2Publication Date: 2012-12-04
- Inventor: Mirko Lehmann , Heinz-Peter Frerichs , Ingo Freund
- Applicant: Mirko Lehmann , Heinz-Peter Frerichs , Ingo Freund
- Applicant Address: DE Freiburg I. Br.
- Assignee: Micronas GmbH
- Current Assignee: Micronas GmbH
- Current Assignee Address: DE Freiburg I. Br.
- Agency: Muncy, Geissler, Olds & Lowe, PLLC
- Priority: EP07007171 20070405
- International Application: PCT/EP2008/002606 WO 20080402
- International Announcement: WO2008/122390 WO 20081016
- Main IPC: G01R27/08
- IPC: G01R27/08 ; G01N19/00

Abstract:
The invention relates to a moisture sensor which comprises a receiving area on its surface for a moisture film, the layer thickness of which is dependent on the relative humidity in the surrounding of the receiving area. The moisture sensor has a signal source which is connected to at least one control electrode at at least one infeed, the electrode abutting the receiving area, for providing a control voltage to the moisture film. The moisture sensor comprises at least one potential sensor which has at least one sensor area, under the receiving area, which is spaced apart from the at least one infeed. The sensor area is electrically insulated from the receiving area by an insulation layer, located between the sensor area and the receiving area, in such a way that an electrical potential can be capacitively detected by means of the potential sensor, the potential being dependent on the layer thickness of the moisture film and the control voltage.
Public/Granted literature
- US20100176826A1 Moisture Sensor and Method for Measuring Moisture of a Gas-Phase Medium Public/Granted day:2010-07-15
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