Invention Grant
- Patent Title: Method and system for correcting image changes
- Patent Title (中): 用于校正图像变化的方法和系统
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Application No.: US12361842Application Date: 2009-01-29
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Publication No.: US08325323B2Publication Date: 2012-12-04
- Inventor: Olaf Conradi , Toralf Gruner
- Applicant: Olaf Conradi , Toralf Gruner
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102006039895 20060825
- Main IPC: G03F7/20
- IPC: G03F7/20
Abstract:
The disclosure relates to a method for compensating image errors, generated by intensity distributions in optical systems, such as in projection lens arrays of microlithography systems, and to respective optical systems, such as projection lens arrays of microlithography systems.
Public/Granted literature
- US20090153831A1 METHOD AND SYSTEM FOR CORRECTING IMAGE CHANGES Public/Granted day:2009-06-18
Information query
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