Invention Grant
US08325950B2 Silicon condenser microphone 有权
硅电容麦克风

Silicon condenser microphone
Abstract:
Disclosed is a silicon condenser microphone including a backplate having a plurality of perforations therethrough, a diaphragm opposed from the backplate for forming a capacitor. The diaphragm includes a first part and a second part received in the first part, the second part being capable of vibrating relative to the backplate. The first part is connected to the ground and the second part is connected to a bias voltage.
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