Invention Grant
- Patent Title: Assessing printability of a very-large-scale integration design
- Patent Title (中): 评估非常大规模集成设计的可印刷性
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Application No.: US13191750Application Date: 2011-07-27
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Publication No.: US08327312B2Publication Date: 2012-12-04
- Inventor: Paul T. Hurley , Krzysztof Kryszczuk , Juri Ranieri , Robin Scheibler
- Applicant: Paul T. Hurley , Krzysztof Kryszczuk , Juri Ranieri , Robin Scheibler
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Gail H. Zarick, Esq.
- Priority: EP10170884 20100727
- Main IPC: G06F11/22
- IPC: G06F11/22 ; G06F17/50

Abstract:
Printability of a very-large-scale integration design is assessed by: during a training phase, generating a training set of very-large-scale integration design shapes representative of a population of very-large-scale integration design shapes, obtaining a set of mathematical representations of respective shapes in the training set, identifying at least two classes of physical events causally linked to the printability for the very-large-scale integration design shapes, each of the classes being associated to a respective level of printability, labeling each mathematical representation of the set according to one of the identified classes, based on a lithography model, and selecting a probabilistic model function maximizing a probability of a class, given the set of mathematical representations; and during a testing phase, providing a very-large-scale integration design shape to be tested, testing the provided very-large-scale integration design shape, and labeling the provided very-large-scale integration design shape according to the identified class.
Public/Granted literature
- US20120030643A1 ASSESSING PRINTABILITY OF A VERY-LARGE-SCALE INTEGRATION DESIGN Public/Granted day:2012-02-02
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