Invention Grant
- Patent Title: High-speed scanning probe microscope
- Patent Title (中): 高速扫描探针显微镜
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Application No.: US13146355Application Date: 2010-01-15
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Publication No.: US08327461B2Publication Date: 2012-12-04
- Inventor: Harish Bhaskaran , Michel Despont , Abu Sebastian
- Applicant: Harish Bhaskaran , Michel Despont , Abu Sebastian
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Gail H. Zarick, Esq.
- Priority: EP09151749 20090130
- International Application: PCT/IB2010/050186 WO 20100115
- International Announcement: WO2010/086759 WO 20100805
- Main IPC: G01Q60/14
- IPC: G01Q60/14 ; G01N13/16 ; G01N13/10

Abstract:
The invention is directed to a probe for scanning probe microscopy. The probe 20 comprises a tunnel-current conducting part 30 and a tunnel-current insulating part 40. The said parts are configured such that the insulating part determines a minimal distance between the conducting part 30 and the sample surface. The invention may further concern a scanning probe microscope having such a probe, and a corresponding scanning probe microscopy method. Since the distance to the sample surface 100 is actually determined by the insulating part 40, controlling the vertical position of the probe 20 relative to the sample surface is easily and rapidly achieved. The configuration of the parts allows for a fast scan of the sample surface, whereby high-speed imaging can be achieved. Further, embodiments allow for topographical variations to be accurately captured through tunneling effect.
Public/Granted literature
- US20110289636A1 HIGH-SPEED SCANNING PROBE MICROSCOPE Public/Granted day:2011-11-24
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