Invention Grant
- Patent Title: Creating emission images of integrated circuits
- Patent Title (中): 创建集成电路的发射图像
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Application No.: US12493686Application Date: 2009-06-29
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Publication No.: US08331726B2Publication Date: 2012-12-11
- Inventor: Franco Stellari , Peilin Song
- Applicant: Franco Stellari , Peilin Song
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Anne V. Dougherty, Esq.
- Main IPC: G06K9/00
- IPC: G06K9/00 ; G06K9/64 ; G06K9/36

Abstract:
A method, system and computer program product are disclosed for creating an image from a device. In one embodiment, the method comprises acquiring first and second images from the device, said first and second images having overlapping portions, and estimating said overlapping portions to obtain an approximate shift amount to align approximately said first and second images. This method further comprises analyzing the overlapping portions, using a defined cross-correlation algorithm, to calculate a precise shift amount to align the first and second images; and using said precise shift amount to join the first and second images together. In one embodiment, an optical system is used to acquire the images, a stage is used to move either the device or the optical system to acquire the first and second images, and the estimating includes using movement of the stage to estimate the overlapping areas.
Public/Granted literature
- US20100329586A1 CREATING EMISSION IMAGES OF INTEGRATED CIRCUITS Public/Granted day:2010-12-30
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