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US08332797B2 Parameterized dummy cell insertion for process enhancement 有权
用于过程增强的参数化虚拟单元插入

Parameterized dummy cell insertion for process enhancement
Abstract:
The present disclosure relates to parameterized dummy cell insertion for process enhancement and methods for fabricating the same. In accordance with one or more embodiments, methods include providing an integrated circuit (IC) design layout with defined pixel-units, simulating thermal effect to the IC design layout including each pixel-unit, generating a thermal effect map of the IC design layout including each pixel-unit, determining a target absorption value for the IC design layout, and performing thermal dummy cell insertion to each pixel-unit of the IC design layout based on the determined target absorption value.
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