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US08333882B2 Polishing apparatus and method of polishing work 失效
抛光设备和抛光工作方法

Polishing apparatus and method of polishing work
Abstract:
The method of polishing a work is capable of reducing a polishing cost, polishing a surface of the work with high polishing accuracy and easily disposing used polishing liquid and used washing liquid. The method comprises the steps of: pressing the work onto a polishing member; feeding polishing liquid; and relatively moving the work with respect to the polishing member. Electrolytic reduced water produced by electrolyzing an electrolyte solution is used as the polishing liquid.
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