Invention Grant
- Patent Title: Semiconductor device and method for its production
- Patent Title (中): 半导体装置及其制造方法
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Application No.: US12733775Application Date: 2008-09-17
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Publication No.: US08334179B2Publication Date: 2012-12-18
- Inventor: Ning Qu , Alfred Goerlach
- Applicant: Ning Qu , Alfred Goerlach
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102007045184 20070921
- International Application: PCT/EP2008/062346 WO 20080917
- International Announcement: WO2009/040279 WO 20090402
- Main IPC: H01L21/8234
- IPC: H01L21/8234

Abstract:
A semiconductor system is described, which is made up of a highly n-doped silicon substrate and a first n-silicon epitaxial layer, which is directly contiguous to the highly n-doped silicon substrate, and having a p-doped SiGe layer, which is contiguous to a second n-doped silicon epitaxial layer and forms a heterojunction diode, which is situated above the first n-doped silicon epitaxial layer and in which the pn-junction is situated within the p-doped SiGe layer. The first n-silicon epitaxial layer has a higher doping concentration than the second n-silicon epitaxial layer. Situated between the two n-doped epitaxial layers is at least one p-doped emitter trough, which forms a buried emitter, a pn-junction both to the first n-doped silicon epitaxial layer and also to the second n-doped silicon epitaxial layer being formed, and the at least one emitter trough being completely enclosed by the two epitaxial layers.
Public/Granted literature
- US20100301387A1 SEMICONDUCTOR DEVICE AND METHOD FOR ITS PRODUCTION Public/Granted day:2010-12-02
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