Invention Grant
- Patent Title: Two-chamber system and method for serial bonding and exfoliation of multiple workpieces
- Patent Title (中): 用于多个工件的串联和剥离的两室系统和方法
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Application No.: US12636410Application Date: 2009-12-11
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Publication No.: US08334191B2Publication Date: 2012-12-18
- Inventor: Steven M. Zuniga , Derek G. Aqui , Andrew J. Nagengast , Kirk G. Liebscher , John M. Alexander , Keenan Leon Guerrero
- Applicant: Steven M. Zuniga , Derek G. Aqui , Andrew J. Nagengast , Kirk G. Liebscher , John M. Alexander , Keenan Leon Guerrero
- Applicant Address: US CA San Jose
- Assignee: Twin Creeks Technology, Inc.
- Current Assignee: Twin Creeks Technology, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Cesari and McKenna, LLP
- Main IPC: H01L21/30
- IPC: H01L21/30 ; H01L21/46

Abstract:
A system for treating distinct batches of workpieces to serial procedures comprises first and second multi-site structures. In each multi-site structure the sites are rotatable for alignment in turn with loading and unloading stations together constituting treatment or process stations. Workpieces of a batch are loaded onto all of the treatment sites and then simultaneously and identically treated by operation of treatment stations with which the process sites are aligned. After treatment in the first structure, workpieces of a batch are transferred from the unloading stations of the first structure to the loading stations of the second structure for further processing.
Public/Granted literature
- US20110143520A1 TWO-CHAMBER SYSTEM AND METHOD FOR SERIAL BONDING AND EXFOLIATION OF MULTIPLE WORKPIECES Public/Granted day:2011-06-16
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