Invention Grant
- Patent Title: Temperature-control device for an optical assembly
- Patent Title (中): 用于光学组件的温度控制装置
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Application No.: US13049703Application Date: 2011-03-16
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Publication No.: US08339569B2Publication Date: 2012-12-25
- Inventor: Armin Schoeppach , Timo Laufer
- Applicant: Armin Schoeppach , Timo Laufer
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102008042215 20080919
- Main IPC: G03B27/52
- IPC: G03B27/52 ; G03B27/42

Abstract:
A temperature-control device is used for controlling the temperature of an optical assembly with at least one optical body, the temperature of which is to be controlled, with at least one optical surface which can be acted upon by a heat flow. The temperature-control device has a heat sink to receive a heat flow, which is emitted by the optical body or a transmission body which is in thermal connection with the optical body. The heat sink is arranged adjacent to a peripheral region of the optical surface. The temperature-control device has a heating mechanism with at least one heating body, which is arranged adjacent to the optical body. The heating body is connected via a physical heat bridge to the heat sink.
Public/Granted literature
- US20110181851A1 TEMPERATURE-CONTROL DEVICE FOR AN OPTICAL ASSEMBLY Public/Granted day:2011-07-28
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