Invention Grant
- Patent Title: Group III nitride semiconductor manufacturing system
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Application No.: US12289257Application Date: 2008-10-23
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Publication No.: US08343239B2Publication Date: 2013-01-01
- Inventor: Shiro Yamazaki , Koji Hirata
- Applicant: Shiro Yamazaki , Koji Hirata
- Applicant Address: JP Nishikasugai-Gun, Aichi-Ken
- Assignee: Toyoda Gosei Co., Ltd.
- Current Assignee: Toyoda Gosei Co., Ltd.
- Current Assignee Address: JP Nishikasugai-Gun, Aichi-Ken
- Agency: McGinn IP Law Group, PLLC
- Priority: JPP2007-278935 20071026
- Main IPC: H01L21/02
- IPC: H01L21/02 ; C30B9/00 ; C30B35/00

Abstract:
The invention provides a group III nitride semiconductor manufacturing system which is free from interruption to rotation of a rotational shaft. The group III nitride semiconductor manufacturing system has a reacting vessel having an opening, a crucible disposed in an interior of the reaction vessel and containing a melt including at least a group III metal and an alkali metal, a holding unit supporting the crucible and having a rotational shaft extending from the interior of the reaction vessel to an exterior of the reaction vessel through the opening, a rotational shaft cover covering a part of the rotational shaft positioned at the exterior of the reacting vessel and connected to the reacting vessel at the opening, a rotational driving unit disposed at an outside of the reacting vessel and regulating the rotational shaft and a supply pipe connected to the rotational shaft cover and supplying a gas including at least nitrogen into a gap between the rotational shaft and the rotational shaft cover, wherein the gas and the melt react to grow a group III nitride semiconductor crystal.
Public/Granted literature
- US20090106959A1 Group III nitride semiconductor manufacturing system Public/Granted day:2009-04-30
Information query
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