Invention Grant
US08343275B2 Single crystal growth method and single crystal pulling apparatus for improving yield and productivity of single crystal 有权
用于提高单晶产量和生产率的单晶生长方法和单晶拉制装置

Single crystal growth method and single crystal pulling apparatus for improving yield and productivity of single crystal
Abstract:
The present invention resides in a silicon single crystal growth method of pulling up and growing a single crystal from a melt of a silicon raw material in a quartz crucible based on a Czochralski method, wherein the method comprises the steps of: applying a DC voltage between an outer wall of the quartz crucible acts as a positive electrode and a pulling wire or pulling shaft for pulling up the silicon single crystal acts as a negative electrode; and fixing an electric current flowing through the silicon single crystal over a period of time for pulling up the single crystal, to grow the single crystal; as well as a pulling apparatus therefor.
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