Invention Grant
US08343327B2 Apparatus and methods for fast chemical electrodeposition for fabrication of solar cells 有权
快速化学电沉积制造太阳能电池的装置和方法

Apparatus and methods for fast chemical electrodeposition for fabrication of solar cells
Abstract:
The invention relates generally to electrodeposition apparatus and methods. When depositing films via electrodeposition, where the substrate has an inherent resistivity, for example, sheet resistance in a thin film, methods and apparatus of the invention are used to electrodeposit materials onto the substrate by forming a plurality of ohmic contacts to the substrate surface and thereby overcome the inherent resistance and electrodeposit uniform films. Methods and apparatus of the invention find particular use in solar cell fabrication.
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