Invention Grant
US08343364B1 Double hard-mask mill back method of fabricating a near field transducer for energy assisted magnetic recording
有权
制造用于能量辅助磁记录的近场换能器的双重硬掩模回磨方法
- Patent Title: Double hard-mask mill back method of fabricating a near field transducer for energy assisted magnetic recording
- Patent Title (中): 制造用于能量辅助磁记录的近场换能器的双重硬掩模回磨方法
-
Application No.: US12796585Application Date: 2010-06-08
-
Publication No.: US08343364B1Publication Date: 2013-01-01
- Inventor: Wei Gao , Guanxiong Li , Zhongyan Wang , Yufeng Hu , Ge Yi
- Applicant: Wei Gao , Guanxiong Li , Zhongyan Wang , Yufeng Hu , Ge Yi
- Applicant Address: US CA Fremont
- Assignee: Western Digital (Fremont), LLC
- Current Assignee: Western Digital (Fremont), LLC
- Current Assignee Address: US CA Fremont
- Main IPC: G11B5/33
- IPC: G11B5/33
Abstract:
A method of forming a near field transducer (NFT) for energy assisted magnetic recording is disclosed. A structure comprising an NFT metal layer and a first hardmask layer over the NFT metal layer is provided A first patterned hardmask is formed from the first hardmask layer, the first patterned hardmask disposed over a disk section and a pin section of the NFT to be formed. An etch process is performed on the NFT metal layer via the first patterned hardmask, the etch process forming the NFT having the disk section and the pin section.
Information query
IPC分类:
