Invention Grant
- Patent Title: Method of aligning nanotubes and wires with an etched feature
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Application No.: US12540869Application Date: 2009-08-13
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Publication No.: US08343373B2Publication Date: 2013-01-01
- Inventor: Colin D. Yates
- Applicant: Colin D. Yates
- Applicant Address: US MA Woburn
- Assignee: Nantero Inc.
- Current Assignee: Nantero Inc.
- Current Assignee Address: US MA Woburn
- Agency: Nantero Inc.
- Main IPC: C23F3/00
- IPC: C23F3/00

Abstract:
A method of forming an aligned connection between a nanotube layer and an etched feature is disclosed. An etched feature is formed having a top and a side and optionally a notched feature at the top. A patterned nanotube layer is formed such that the nanotube layer contacts portions of the side and overlaps a portion of the top of the etched feature. The nanotube layer is then covered with an insulating layer. Then a top portion of the insulating layer is removed to expose a top portion of the etched feature.
Public/Granted literature
- US20090314530A1 METHOD OF ALIGNING NANOTUBES AND WIRES WITH AN ETCHED FEATURE Public/Granted day:2009-12-24
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