Invention Grant
- Patent Title: Flexible semiconductor device and method for manufacturing same
- Patent Title (中): 柔性半导体器件及其制造方法
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Application No.: US12681445Application Date: 2009-07-30
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Publication No.: US08343822B2Publication Date: 2013-01-01
- Inventor: Koichi Hirano , Seiichi Nakatani , Tatsuo Ogawa , Takashi Ichiryu , Takeshi Suzuki
- Applicant: Koichi Hirano , Seiichi Nakatani , Tatsuo Ogawa , Takashi Ichiryu , Takeshi Suzuki
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: Wenderoth, Lind & Ponack, L.L.P.
- Priority: JP2008-200766 20080804; JP2008-200767 20080804
- International Application: PCT/JP2009/003616 WO 20090730
- International Announcement: WO2010/016207 WO 20100211
- Main IPC: H01L21/84
- IPC: H01L21/84 ; H01L21/00

Abstract:
A method for manufacturing a flexible semiconductor device includes (i) forming an insulating film on the upper surface of metal foil, (ii) forming an extraction electrode pattern on the upper surface of the metal foil, (iii) forming a semiconductor layer on the insulating film such that the semiconductor layer is in contact with the extraction electrode pattern, (iv) forming a sealing resin layer on the upper surface of the metal foil such that the sealing resin layer covers the semiconductor layer and the extraction electrode pattern, and (v) forming electrodes by etching the metal foil, the metal foil being used as a support for the insulating film, the extraction electrode pattern, the semiconductor layer, and the sealing resin layer formed in (i) to (iv) and used as a constituent material for the electrodes in (v). The metal foil need not be stripped, and a high-temperature process can be used.
Public/Granted literature
- US20100283054A1 FLEXIBLE SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME Public/Granted day:2010-11-11
Information query
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