Invention Grant
US08343837B2 Work function adjustment in a high-k gate electrode structure after transistor fabrication by using lanthanum
有权
通过使用镧在晶体管制造后的高k栅电极结构中的功函数调整
- Patent Title: Work function adjustment in a high-k gate electrode structure after transistor fabrication by using lanthanum
- Patent Title (中): 通过使用镧在晶体管制造后的高k栅电极结构中的功函数调整
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Application No.: US12691192Application Date: 2010-01-21
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Publication No.: US08343837B2Publication Date: 2013-01-01
- Inventor: Richard Carter , Sven Beyer , Joachim Metzger , Robert Binder
- Applicant: Richard Carter , Sven Beyer , Joachim Metzger , Robert Binder
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES, Inc.
- Current Assignee: GLOBALFOUNDRIES, Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Williams, Morgan & Amerson
- Priority: DE102009006802 20090130
- Main IPC: H01L21/8234
- IPC: H01L21/8234 ; H01L21/8238

Abstract:
The work function of a high-k gate electrode structure may be adjusted in a late manufacturing stage on the basis of a lanthanum species in an N-channel transistor, thereby obtaining the desired high work function in combination with a typical conductive barrier material, such as titanium nitride. For this purpose, in some illustrative embodiments, the lanthanum species may be formed directly on the previously provided metal-containing electrode material, while an efficient barrier material may be provided in the P-channel transistor, thereby avoiding undue interaction of the lanthanum species in the P-channel transistor.
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