Invention Grant
- Patent Title: Three-dimensional pattern forming material
- Patent Title (中): 三维图案成型材料
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Application No.: US12743681Application Date: 2008-11-21
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Publication No.: US08344039B2Publication Date: 2013-01-01
- Inventor: Makoto Hanabata
- Applicant: Makoto Hanabata
- Applicant Address: JP Tokyo
- Assignee: Nissan Chemical Industries, Ltd.
- Current Assignee: Nissan Chemical Industries, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2007-309256 20071129
- International Application: PCT/JP2008/071242 WO 20081121
- International Announcement: WO2009/069557 WO 20090604
- Main IPC: H01L21/027
- IPC: H01L21/027 ; C08F2/46 ; C08F292/00 ; G03C9/00

Abstract:
There is provided a photo-curable composition that shows the suppression of a residual film formation and a high adhesion thereof to a substrate in a process for forming a three-dimensional pattern by a photo-imprinting method. A photo-curable composition for forming a three-dimensional pattern by a photo-imprinting method, comprises a monomer having a photopolymerizable group; an inorganic fine particle to which a dispersant is added; and a photopolymerization initiator. It is preferred that the inorganic fine particle (e.g., silica) has an average particle diameter of 1 to 1,000 nm, and the dispersant is a silane coupling agent, particularly a silane coupling agent containing an organic group having a carbon-carbon unsaturated bond or an organic group having an epoxy group.
Public/Granted literature
- US20100286300A1 THREE-DIMENSIONAL PATTERN FORMING MATERIAL Public/Granted day:2010-11-11
Information query
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