Invention Grant
US08344286B2 Enhanced quality of laser ablation by controlling laser repetition rate
有权
通过控制激光重复率提高激光烧蚀质量
- Patent Title: Enhanced quality of laser ablation by controlling laser repetition rate
- Patent Title (中): 通过控制激光重复率提高激光烧蚀质量
-
Application No.: US11624235Application Date: 2007-01-18
-
Publication No.: US08344286B2Publication Date: 2013-01-01
- Inventor: Peter P. Longo , Alfred Wagner
- Applicant: Peter P. Longo , Alfred Wagner
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Daniel P. Morris, Esq.
- Main IPC: B23K26/36
- IPC: B23K26/36 ; B29C35/08
Abstract:
A method of enhancing the quality of laser ablation by controlling the laser repetition rate during the ablation process, wherein the method enhances the quality of laser ablation of a photomask in order to improve the optical quality thereof. Also provided is a system employing the method of enhancing the quality of laser ablation.
Public/Granted literature
- US20100289186A1 ENHANCED QUALITY OF LASER ABLATION BY CONTROLLING LASER REPETITION RATE Public/Granted day:2010-11-18
Information query
