Invention Grant
- Patent Title: Pressure sensor
- Patent Title (中): 压力传感器
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Application No.: US12685372Application Date: 2010-01-11
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Publication No.: US08344314B2Publication Date: 2013-01-01
- Inventor: Axel Kramer , Frank Kassubek , Klaus Bohnert , Hubert Braendle
- Applicant: Axel Kramer , Frank Kassubek , Klaus Bohnert , Hubert Braendle
- Applicant Address: CH Zurich
- Assignee: ABB Research Ltd
- Current Assignee: ABB Research Ltd
- Current Assignee Address: CH Zurich
- Agency: Buchanan Ingersoll & Rooney PC
- Main IPC: G01L7/00
- IPC: G01L7/00 ; G01L11/02 ; G01L1/24

Abstract:
A pressure sensor is disclosed with at least one pressure sensing element, the pressure induced changes in the optical properties of which are evaluated by illumination with at least one light source. The pressure sensor can include at least two semiconductor-based pressure sensing elements located in individual pressure chambers, which sensing elements are located essentially adjacent to each other. The sensing elements can be irradiated with the same light source, wherein the light transmitted through the sensing elements is detected using at least two corresponding detectors, and wherein the differential pressure in the two pressure chambers is evaluated based on the output of these detectors.
Public/Granted literature
- US20100108870A1 PRESSURE SENSOR Public/Granted day:2010-05-06
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