Invention Grant
- Patent Title: Inspection apparatus and inspection method using electromagnetic wave
- Patent Title (中): 检验仪器和检验方法采用电磁波
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Application No.: US12682248Application Date: 2008-11-27
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Publication No.: US08344324B2Publication Date: 2013-01-01
- Inventor: Shintaro Kasai , Toshihiko Ouchi , Takeaki Itsuji
- Applicant: Shintaro Kasai , Toshihiko Ouchi , Takeaki Itsuji
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2007-310462 20071130
- International Application: PCT/JP2008/071993 WO 20081127
- International Announcement: WO2009/069818 WO 20090604
- Main IPC: G01N21/35
- IPC: G01N21/35

Abstract:
An apparatus for acquiring information on a time waveform of a terahertz wave is comprised of a terahertz wave-generating unit, a waveform information-detecting unit, and a delay unit for changing the time after the terahertz wave is generated in the generating unit until it is detected as waveform information of the terahertz wave in the detecting unit, wherein the delay unit is configured so as to change a propagating distance of the terahertz wave generated by the generating unit, and associates waveform information of the terahertz wave, which is detected in the detecting unit, and the propagating distance every terahertz wave generated by the generating unit.
Public/Granted literature
- US20100252738A1 INSPECTION APPARATUS AND INSPECTION METHOD USING ELECTROMAGNETIC WAVE Public/Granted day:2010-10-07
Information query
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