Invention Grant
- Patent Title: Thin film transistor
- Patent Title (中): 薄膜晶体管
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Application No.: US12891704Application Date: 2010-09-27
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Publication No.: US08344373B2Publication Date: 2013-01-01
- Inventor: Ayumu Sato , Hideya Kumomi , Ryo Hayashi , Tomohiro Watanabe
- Applicant: Ayumu Sato , Hideya Kumomi , Ryo Hayashi , Tomohiro Watanabe
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc., IP Division
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L21/84

Abstract:
To achieve, in an oxide semiconductor thin layer transistor, both the stability of threshold voltage against electric stress and suppression of variation in the threshold voltage in a transfer characteristic. A thin film transistor includes an oxide semiconductor layer and a gate insulating layer disposed so as to be in contact with the oxide semiconductor layer, wherein the oxide semiconductor layer contains hydrogen atoms and includes at least two regions that function as active layers of the oxide semiconductor and have different average hydrogen concentrations in the layer thickness direction; and when the regions functioning as the active layers of the oxide semiconductor are sequentially defined as, from the side of the gate insulating layer, a first region and a second region, the average hydrogen concentration of the first region is lower than the average hydrogen concentration of the second region.
Public/Granted literature
- US20110073856A1 THIN FILM TRANSISTOR Public/Granted day:2011-03-31
Information query
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