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US08344395B2 Light-emitting diode and manufacturing method thereof 失效
发光二极管及其制造方法

  • Patent Title: Light-emitting diode and manufacturing method thereof
  • Patent Title (中): 发光二极管及其制造方法
  • Application No.: US12775674
    Application Date: 2010-05-07
  • Publication No.: US08344395B2
    Publication Date: 2013-01-01
  • Inventor: Kensuke Kojima
  • Applicant: Kensuke Kojima
  • Applicant Address: JP Tokyo
  • Assignee: Sony Corporation
  • Current Assignee: Sony Corporation
  • Current Assignee Address: JP Tokyo
  • Agency: K&L Gates LLP
  • Priority: JPP2009-129766 20090529
  • Main IPC: H01L33/00
  • IPC: H01L33/00
Light-emitting diode and manufacturing method thereof
Abstract:
A method for manufacturing a light-emitting diode includes the steps of: growing a light-emitting diode structure-forming semiconductor layer of a compound semiconductor having a zincblende crystal structure on a first substrate formed of a compound semiconductor having a zincblende crystal structure and that has a principal surface tilted in a [110] direction with respect to a (001) plane; bonding the first substrate to a second substrate on the side of the semiconductor layer; removing the first substrate so as to expose the semiconductor layer; forming an etching mask on the exposed surface of the semiconductor layer in a rectangular planar shape so that a longer side extends in a [110] or [−1-10] direction, and that a shorter side extends in a [−110] or [1-10] direction; and patterning the semiconductor layer by wet etching using the etching mask.
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