Invention Grant
- Patent Title: Light-emitting diode and manufacturing method thereof
- Patent Title (中): 发光二极管及其制造方法
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Application No.: US12775674Application Date: 2010-05-07
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Publication No.: US08344395B2Publication Date: 2013-01-01
- Inventor: Kensuke Kojima
- Applicant: Kensuke Kojima
- Applicant Address: JP Tokyo
- Assignee: Sony Corporation
- Current Assignee: Sony Corporation
- Current Assignee Address: JP Tokyo
- Agency: K&L Gates LLP
- Priority: JPP2009-129766 20090529
- Main IPC: H01L33/00
- IPC: H01L33/00

Abstract:
A method for manufacturing a light-emitting diode includes the steps of: growing a light-emitting diode structure-forming semiconductor layer of a compound semiconductor having a zincblende crystal structure on a first substrate formed of a compound semiconductor having a zincblende crystal structure and that has a principal surface tilted in a [110] direction with respect to a (001) plane; bonding the first substrate to a second substrate on the side of the semiconductor layer; removing the first substrate so as to expose the semiconductor layer; forming an etching mask on the exposed surface of the semiconductor layer in a rectangular planar shape so that a longer side extends in a [110] or [−1-10] direction, and that a shorter side extends in a [−110] or [1-10] direction; and patterning the semiconductor layer by wet etching using the etching mask.
Public/Granted literature
- US20100301380A1 LIGHT-EMITTING DIODE AND MANUFACTURING METHOD THEREOF Public/Granted day:2010-12-02
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