Invention Grant
US08344440B2 Three-terminal single poly NMOS non-volatile memory cell with shorter program/erase times
有权
具有较短编程/擦除次数的三端单单多晶硅非易失性存储单元
- Patent Title: Three-terminal single poly NMOS non-volatile memory cell with shorter program/erase times
- Patent Title (中): 具有较短编程/擦除次数的三端单单多晶硅非易失性存储单元
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Application No.: US13011774Application Date: 2011-01-21
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Publication No.: US08344440B2Publication Date: 2013-01-01
- Inventor: Evgeny Pikhay , Micha Gutman , Yakov Roizin
- Applicant: Evgeny Pikhay , Micha Gutman , Yakov Roizin
- Applicant Address: IL Migdal Haemek
- Assignee: Tower Semiconductor Ltd.
- Current Assignee: Tower Semiconductor Ltd.
- Current Assignee Address: IL Migdal Haemek
- Agency: Bever, Hoffman & Harms, LLP
- Agent Patrick T. Bever
- Main IPC: H01L29/788
- IPC: H01L29/788

Abstract:
A three terminal non-volatile memory (NVM) cell for a CMOS IC is formed by either a standard CMOS process flow or a slightly modified CMOS process flow. The NVM cell includes read and injection transistors that share a common floating gate. The floating gate includes a portion disposed over the channel region of the read transistor, a portion disposed over the channel region of the injection transistor, and a portion extending into an enlarged drain diffusion area away from the channel regions, whereby the gate-to-drain capacitance is higher than the gate-to-source capacitances. The source/drain of the injection transistor are formed using different LDD implants to achieve faster program/erase. Alternatively, an optional CHE enhancing implant is added to the source/drain of the injection transistor to enhance CHE programming. Both HV LDD and LV LDD implants are introduced together enabling LDD implant merging under the floating gate extension.
Public/Granted literature
- US20110121379A1 Three-Terminal Single Poly NMOS Non-Volatile Memory Cell With Shorter Program/Erase Times Public/Granted day:2011-05-26
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