Invention Grant
US08344444B2 Semiconductor device having a nonvolatile memory cell with a cap insulating film formed over a selection gate electrode
有权
半导体器件具有在选择栅电极上形成的具有帽绝缘膜的非易失性存储单元
- Patent Title: Semiconductor device having a nonvolatile memory cell with a cap insulating film formed over a selection gate electrode
- Patent Title (中): 半导体器件具有在选择栅电极上形成的具有帽绝缘膜的非易失性存储单元
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Application No.: US12699731Application Date: 2010-02-03
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Publication No.: US08344444B2Publication Date: 2013-01-01
- Inventor: Yoshiyuki Kawashima , Keiichi Haraguchi
- Applicant: Yoshiyuki Kawashima , Keiichi Haraguchi
- Applicant Address: JP Kawasaki-shi
- Assignee: Renesas Electronics Corporation
- Current Assignee: Renesas Electronics Corporation
- Current Assignee Address: JP Kawasaki-shi
- Agency: Miles and Stockbridge P.C.
- Priority: JP2009-027604 20090209
- Main IPC: H01L29/792
- IPC: H01L29/792

Abstract:
To provide a technique capable of improving reliability of a semiconductor device having a nonvolatile memory cell by suppressing the reduction of the drive force.A memory cell is configured by a selection pMIS having a selection gate electrode including a conductive film exhibiting a p-type conductivity and a memory pMIS having a memory gate electrode including a conductive film exhibiting a p-type conductivity, and at the time of write, hot electrons are injected into a charge storage layer from the side of a semiconductor substrate 1 and at the time of erase, hot holes are injected into the charge storage layer from the memory gate electrode.
Public/Granted literature
- US20100200909A1 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME Public/Granted day:2010-08-12
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