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US08344516B2 Integrated chip carrier with compliant interconnects 有权
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Integrated chip carrier with compliant interconnects
Abstract:
A silicon chip includes a silicon substrate, a plurality of pads, and a plurality of through vias to connect back-end-of-line wiring to the plurality of pads. The silicon substrate includes a layer of active devices and the back-end-of-line wiring connected to the active devices.
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