Invention Grant
- Patent Title: Capacitive electro-mechanical transducer, and fabrication method of the same
- Patent Title (中): 电容式机电换能器及其制造方法
-
Application No.: US12774492Application Date: 2010-05-05
-
Publication No.: US08344587B2Publication Date: 2013-01-01
- Inventor: Yasuhiro Soeda
- Applicant: Yasuhiro Soeda
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. IP Division
- Priority: JP2009-113105 20090508
- Main IPC: H02K19/00
- IPC: H02K19/00
Abstract:
A capacitive electro-mechanical transducer includes a plurality of cavities, a communicating portion for connecting the cavities to each other, and two electrodes sandwiching each of the cavities. The cavities are sealed from outside, and at least a portion of the communicating portion is closed to interrupt the communication between the cavities through the communicating portion.
Public/Granted literature
- US20100283354A1 CAPACITIVE ELECTRO-MECHANICAL TRANSDUCER, AND FABRICATION METHOD OF THE SAME Public/Granted day:2010-11-11
Information query
