Invention Grant
- Patent Title: Acoustic wave device with frequency control film
- Patent Title (中): 具有频率控制膜的声波装置
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Application No.: US13431642Application Date: 2012-03-27
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Publication No.: US08344590B2Publication Date: 2013-01-01
- Inventor: Tsuyoshi Yokoyama , Shinji Taniguchi , Tokihiro Nishihara , Masanori Ueda
- Applicant: Tsuyoshi Yokoyama , Shinji Taniguchi , Tokihiro Nishihara , Masanori Ueda
- Applicant Address: JP Tokyo
- Assignee: Taiyo Yuden Co., Ltd.
- Current Assignee: Taiyo Yuden Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Chen Yoshimura LLP
- Priority: JP2009-223282 20090928
- Main IPC: H01L41/04
- IPC: H01L41/04 ; H03H9/205

Abstract:
An acoustic wave device includes a main resonator and a sub resonator each having a substrate, a lower electrode provided on the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on an upper side of the piezoelectric film. The sub resonator has a mass addition film on the upper electrode in a resonance area in which the upper electrode and the lower electrode face each other. At least one of the main resonator and the sub resonator is provided with a frequency control film on an upper side of the resonance area, and the frequency control film has a weight per unit area smaller than a weight of the mass addition film per unit area.
Public/Granted literature
- US20120200195A1 ACOUSTIC WAVE DEVICE Public/Granted day:2012-08-09
Information query
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