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Invention Grant
US08345217B2 Liquid recovery member, exposure apparatus, exposing method, and device fabricating method 有权
液体回收构件，曝光装置，曝光方法和装置制造方法

  • Patent Title: Liquid recovery member, exposure apparatus, exposing method, and device fabricating method
  • Patent Title (中): 液体回收构件，曝光装置，曝光方法和装置制造方法
  • Application No.: US12149782
    Application Date: 2008-05-08
  • Publication No.: US08345217B2
    Publication Date: 2013-01-01
  • Inventor: Hiroyuki Nagasaka
  • Applicant: Hiroyuki Nagasaka
  • Applicant Address: JP Tokyo
  • Assignee: Nikon Corporation
  • Current Assignee: Nikon Corporation
  • Current Assignee Address: JP Tokyo
  • Agency: Oliff & Berridge, PLC
  • Priority: JPP2005-328549 20051114
  • Main IPC: G03B27/52
  • IPC: G03B27/52
Liquid recovery member, exposure apparatus, exposing method, and device fabricating method
Abstract:
An exposure apparatus comprises a recovery member that recovers a liquid. The recovery ability with which the recovery member recovers the liquid differs in accordance with the region of the recovery member.
Abstract(Chinese):

曝光装置包括回收液体的回收构件。 回收构件回收液体的回收能力根据回收构件的区域而不同。

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