Invention Grant
US08345262B2 Method and apparatus for determining a deviation of an actual shape from a desired shape of an optical surface
有权
用于确定实际形状与光学表面的期望形状的偏差的方法和装置
- Patent Title: Method and apparatus for determining a deviation of an actual shape from a desired shape of an optical surface
- Patent Title (中): 用于确定实际形状与光学表面的期望形状的偏差的方法和装置
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Application No.: US13361442Application Date: 2012-01-30
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Publication No.: US08345262B2Publication Date: 2013-01-01
- Inventor: Frank Schillke , Rolf Freimann , Matthias Dreher
- Applicant: Frank Schillke , Rolf Freimann , Matthias Dreher
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Sughrue Mion, PLLC
- Priority: DE102006035022 20060728
- Main IPC: G01B11/02
- IPC: G01B11/02
Abstract:
An optical element having an optical surface (12; 103), which optical surface has an actual shape, the actual shape deviating from a desired shape by maximum 0.2 nm, wherein the desired shape is either: a free-form surface having a deviation from its best-fitting sphere of at least 5 μm or a substantially rotationally symmetrical surface having a deviation from its best-fitting sphere of at least 0.5 mm.
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