Invention Grant
- Patent Title: MEMS scanning micromirror with reduced dynamic deformation
- Patent Title (中): MEMS扫描微镜具有减小的动态变形
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Application No.: US12681621Application Date: 2008-10-02
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Publication No.: US08345336B2Publication Date: 2013-01-01
- Inventor: Krassimir T. Krastev , Hendrikus W. L. A. M. van Lierop , Hermanus M. J. R. Soemers , Renatus H. M. Sanders
- Applicant: Krassimir T. Krastev , Hendrikus W. L. A. M. van Lierop , Hermanus M. J. R. Soemers , Renatus H. M. Sanders
- Applicant Address: NL Eindhoven
- Assignee: Innoluce B.V.
- Current Assignee: Innoluce B.V.
- Current Assignee Address: NL Eindhoven
- Agency: Hoffmann & Baron, LLP
- International Application: PCT/IB2008/054028 WO 20081002
- International Announcement: WO2009/044360 WO 20090409
- Main IPC: G02B26/08
- IPC: G02B26/08

Abstract:
A MEMS scanning micromirror with reduced dynamic deformation with a mirror support including a rotation axis beam 120 having a rotation axis 58; a pair of extension bars 56 parallel to the rotation axis 58, each having a first end 140, a midpoint 142, and a second end 144; and a pair of X beams 130, each of the pair of X beams 130 having a cross midpoint 134. One of the pair of X beams 130 is connected to the first end 140 and the midpoint 142 of each of the pair of extension bars 56; the other of the pair of X beams 130 is connected to the midpoint 142 and the second end 144 of each of the pair of extension bars 56; and the rotation axis beam 120 is connected to the cross midpoint 134 of each of the pair of X beams 130.
Public/Granted literature
- US20100290142A1 MEMS SCANNING MICROMIRROR WITH REDUCED DYNAMIC DEFORMATION Public/Granted day:2010-11-18
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