Invention Grant
- Patent Title: Ferroelectric capacitor and its manufacturing method
- Patent Title (中): 铁电电容器及其制造方法
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Application No.: US12045135Application Date: 2008-03-10
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Publication No.: US08345461B2Publication Date: 2013-01-01
- Inventor: Masahisa Nawano
- Applicant: Masahisa Nawano
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2007-064596 20070314
- Main IPC: G11C11/22
- IPC: G11C11/22

Abstract:
A ferroelectric capacitor includes: a ferroelectric film, and a lower electrode and an upper electrode interposing the ferroelectric film, wherein the ferroelectric film includes a first ferroelectric layer of ferroelectric material having a perovskite type crystal structure expressed by a general formula ABO3 formed by a metal organic chemical vapor deposition method, a second ferroelectric layer of ferroelectric material in which a part of B site element in ferroelectric material having a perovskite type crystal structure expressed by a general formula ABO3 is replaced with Nb, and a third ferroelectric layer of ferroelectric material having a perovskite type crystal structure expressed by a general formula ABO3 formed by a sol-gel method, which are sequentially laminated from the side of the lower electrode.
Public/Granted literature
- US20080225569A1 FERROELECTRIC CAPACITOR AND ITS MANUFACTURING METHOD Public/Granted day:2008-09-18
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