Invention Grant
- Patent Title: Pattern generation method, computer-readable recording medium, and semiconductor device manufacturing method
- Patent Title (中): 图案生成方法,计算机可读记录介质和半导体器件制造方法
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Application No.: US12354119Application Date: 2009-01-15
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Publication No.: US08347241B2Publication Date: 2013-01-01
- Inventor: Fumiharu Nakajima , Toshiya Kotani , Hiromitsu Mashita , Chikaaki Kodama
- Applicant: Fumiharu Nakajima , Toshiya Kotani , Hiromitsu Mashita , Chikaaki Kodama
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- Priority: JP2008-009231 20080118
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
A pattern generation method includes: acquiring a first design constraint for first patterns to be formed on a process target film by a first process, the first design constraint using, as indices, a pattern width of an arbitrary one of the first patterns, and a space between the arbitrary pattern and a pattern adjacent to the arbitrary pattern; correcting the first design constraint in accordance with pattern conversion by the second process, and thereby acquiring a second design constraint for the second pattern which uses, as indices, two patterns on both sides of a predetermined pattern space of the second pattern; judging whether the design pattern fulfils the second design constraint; and changing the design pattern so as to correspond to a value allowed by the second design constraint when the design constraint is not fulfilled.
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