Invention Grant
US08351033B2 Tunable filter, light source apparatus, and spectral distribution measuring apparatus 有权
可调滤波器,光源装置和频谱分布测量装置

  • Patent Title: Tunable filter, light source apparatus, and spectral distribution measuring apparatus
  • Patent Title (中): 可调滤波器,光源装置和频谱分布测量装置
  • Application No.: US12627842
    Application Date: 2009-11-30
  • Publication No.: US08351033B2
    Publication Date: 2013-01-08
  • Inventor: Atsushi Katsunuma
  • Applicant: Atsushi Katsunuma
  • Applicant Address: JP Tokyo
  • Assignee: Nikon Corporation
  • Current Assignee: Nikon Corporation
  • Current Assignee Address: JP Tokyo
  • Agency: Klarquist Sparkman, LLP
  • Priority: JP2007-144429 20070531
  • Main IPC: G01J3/28
  • IPC: G01J3/28
Tunable filter, light source apparatus, and spectral distribution measuring apparatus
Abstract:
A tunable filter including: a polarization splitter that splits input light into two linearly polarized light rays of mutually orthogonal vibration directions; a wavelength dispersion spectroscopic element that splits the two linearly polarized light rays into two spectral images having spatial spread in one direction; and a reflective spatial modulator device that modulates and reflects linearly polarized light in each wavelength region for the two spectral images independently from each other. Modulated light reflected at the reflective spatial modulator device reenters the wavelength dispersion spectroscopic element and the polarization splitter, thereby splitting and outputting the modulated light, as output light in a wavelength region modulated by the reflective spatial modulator device and output light in a wavelength region not modulated, and input light and reentered light to the polarization splitter and input light and reentered light to the wavelength dispersion spectroscopic element are parallel light fluxes.
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