Invention Grant
US08354141B2 Liquid treatment apparatus, mounting and dismounting method of a cup body, and storage medium
有权
液体处理装置,杯体的安装和拆卸方法以及存储介质
- Patent Title: Liquid treatment apparatus, mounting and dismounting method of a cup body, and storage medium
- Patent Title (中): 液体处理装置,杯体的安装和拆卸方法以及存储介质
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Application No.: US13114346Application Date: 2011-05-24
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Publication No.: US08354141B2Publication Date: 2013-01-15
- Inventor: Tsunenaga Nakashima , Gouichi Iwao , Naofumi Kishita , Nobuhiro Ogata
- Applicant: Tsunenaga Nakashima , Gouichi Iwao , Naofumi Kishita , Nobuhiro Ogata
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Smith, Gambrell & Russell, LLP
- Priority: JP2006-287966 20061023; JP2007-119541 20070427
- Main IPC: B05D3/12
- IPC: B05D3/12

Abstract:
A liquid treatment apparatus treating a surface of a substrate held generally horizontally on a stage in a housing by supplying a treating liquid to said surface from a supply nozzle. The liquid treatment apparatus includes a cup body provided so as to surround the substrate held in the substrate holding part laterally, the cup body being mounted detachably to a base inside the housing from an upward direction thereof; a cup body holding part holding the cup body detachably; and an elevating mechanism moving the cup body holding part up and down between a first position at which the cup body is mounted upon the base body and a second position located above the first position.
Public/Granted literature
- US20110220216A1 LIQUID TREATMENT APPARATUS, MOUNTING AND DISMOUNTING METHOD OF A CUP BODY, AND STORAGE MEDIUM Public/Granted day:2011-09-15
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