Invention Grant
- Patent Title: Liquid chemical deposition apparatus and process and products therefrom
- Patent Title (中): 液体化学沉积设备及其工艺和产品
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Application No.: US12843112Application Date: 2010-07-26
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Publication No.: US08354294B2Publication Date: 2013-01-15
- Inventor: L. Pierre de Rochemont , Alexander J. Kovacs
- Applicant: L. Pierre de Rochemont , Alexander J. Kovacs
- Agency: Burns & Levinson LLP
- Agent Jacob N Erlich; David W Gomes
- Main IPC: H01L31/062
- IPC: H01L31/062 ; H01L31/048

Abstract:
A method, apparatus and material produced thereby in an amorphous or crystalline form having multiple elements with a uniform molecular distribution of elements at the molecular level.
Public/Granted literature
- US20110021007A1 LIQUID CHEMICAL DEPOSTION APPARATUS AND PROCESS AND PRODUCTS THEREFROM Public/Granted day:2011-01-27
Information query
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