Invention Grant
- Patent Title: Load chamber with dual heaters
- Patent Title (中): 带双加热器的加载室
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Application No.: US12828159Application Date: 2010-06-30
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Publication No.: US08354618B1Publication Date: 2013-01-15
- Inventor: Jinliang Chen , Yew Ming Chiong
- Applicant: Jinliang Chen , Yew Ming Chiong
- Applicant Address: US CA San Jose
- Assignee: WD Media, Inc.
- Current Assignee: WD Media, Inc.
- Current Assignee Address: US CA San Jose
- Main IPC: F27D11/00
- IPC: F27D11/00 ; H05B3/10 ; B05D5/06 ; B05D5/12 ; C30B23/00 ; C30B25/00 ; C30B28/12 ; C30B28/14
Abstract:
A disk processing system with a load chamber having a stationary heater and a movable heater.
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