Invention Grant
US08354652B2 Ion source including separate support systems for accelerator grids
有权
离子源包括加速器网格的单独支撑系统
- Patent Title: Ion source including separate support systems for accelerator grids
- Patent Title (中): 离子源包括加速器网格的单独支撑系统
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Application No.: US12309460Application Date: 2007-07-12
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Publication No.: US08354652B2Publication Date: 2013-01-15
- Inventor: Gary Proudfoot , Gordon Robert Green , Robert Kenneth Trowell
- Applicant: Gary Proudfoot , Gordon Robert Green , Robert Kenneth Trowell
- Applicant Address: GB Newport, Wales
- Assignee: Aviza Technology Limited
- Current Assignee: Aviza Technology Limited
- Current Assignee Address: GB Newport, Wales
- Agency: Volentine & Whitt, PLLC
- Priority: GB0614501.5 20060721
- International Application: PCT/GB2007/002614 WO 20070712
- International Announcement: WO2008/009898 WO 20080124
- Main IPC: G21K1/08
- IPC: G21K1/08 ; H01J3/14 ; H01J49/42 ; F03H1/00
Abstract:
This invention relates to an Ion gun (10) which comprises of plasma generator (11) driven from an RF source (12), a plasma or source chamber (13), having an outlet (14), across which is mounted an accelerator grid (15). The accelerator grid (15) comprises four individual grids. The first grid (16), which is closest to the outlet (14), is maintained at a positive voltage by a DC source (16a), the second grid (17) is maintained strongly negative by DC source (17a). The third grid (18) is maintained at a negative voltage, which is much lower than that of the second grid (17), by DC source (18a) and the fourth grid is grounded. Means of mounting these grids are also described.
Public/Granted literature
- US20090309042A1 ION SOURCES Public/Granted day:2009-12-17
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