Invention Grant
- Patent Title: Semiconductor device and method for fabricating the same
- Patent Title (中): 半导体装置及其制造方法
-
Application No.: US11798528Application Date: 2007-05-15
-
Publication No.: US08354726B2Publication Date: 2013-01-15
- Inventor: Masafumi Tsutsui
- Applicant: Masafumi Tsutsui
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2006-139728 20060519
- Main IPC: H01L29/76
- IPC: H01L29/76

Abstract:
A semiconductor device includes: a first active region surrounded with an isolation region of a semiconductor substrate; a first gate electrode formed over the first active region and having a protrusion protruding on the isolation region; a first side-wall insulating film; an auxiliary pattern formed to be spaced apart in the gate width direction from the protrusion of the first gate electrode; a second side-wall insulating film; and a stress-containing insulating film containing internal stress and formed to cover the first gate electrode, the first side-wall insulating film, the auxiliary pattern, and the second side-wall insulating film. In this device, the distance between the first gate electrode and the auxiliary pattern is smaller than the sum total of: the sum of the thicknesses of the first and second side-wall insulating films; and the double of the thickness of the stress-containing insulating film.
Public/Granted literature
- US20070267707A1 Semiconductor device and method for fabricating the same Public/Granted day:2007-11-22
Information query
IPC分类: