Invention Grant
US08355423B2 VCSEL with non-circular mesa and current confinement aperture for higher order lateral mode emission
有权
具有非圆形台面和电流限制孔径的VCSEL用于高阶横向模式发射
- Patent Title: VCSEL with non-circular mesa and current confinement aperture for higher order lateral mode emission
- Patent Title (中): 具有非圆形台面和电流限制孔径的VCSEL用于高阶横向模式发射
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Application No.: US13121885Application Date: 2009-09-30
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Publication No.: US08355423B2Publication Date: 2013-01-15
- Inventor: Michael Moser , Sven Eitel , Wolfgang Kaiser
- Applicant: Michael Moser , Sven Eitel , Wolfgang Kaiser
- Applicant Address: GB Towcester
- Assignee: Oclaro Technology Limited
- Current Assignee: Oclaro Technology Limited
- Current Assignee Address: GB Towcester
- Agency: Fenwick & West LLP
- Priority: GB0817786.7 20080930
- International Application: PCT/GB2009/051281 WO 20090930
- International Announcement: WO2010/038067 WO 20100408
- Main IPC: H01S5/00
- IPC: H01S5/00

Abstract:
A vertical cavity surface emitting laser (VCSEL) (100) has a substrate (104), on which are disposed first and second distributed Bragg reflectors (DBRs) (106, 112), each DBR comprising a stack of layers of alternating refractive index, an active layer (108) disposed between the DBRs, and an aperture layer (110) disposed either between the DBRs or within one of the DBRs. The aperture layer (110) has a border (116) having an internal boundary with a plurality of indented portions defining one or more apertures. Such a VCSEL is easily manufacturable and provides a narrow bandwidth output, as well as mitigating at least some of the problems of prior art VCSELs. Mesa (102) may be etched to be non-circular and subsequent selective oxidation of aperture layer (110) results in a non-circular current confinement aperture (114) promoting higher-order lateral modes (LP21).
Public/Granted literature
- US20110176572A1 VCSEL WITH NON-CIRCULAR MESA AND CURRENT CONFINEMENT APERTURE FOR HIGHER-ORDER LATERAL MODE EMISSION Public/Granted day:2011-07-21
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