Invention Grant
US08355808B2 Server device of group management system having function of performing fault detection and program
有权
具有执行故障检测和程序功能的组管理系统的服务器设备
- Patent Title: Server device of group management system having function of performing fault detection and program
- Patent Title (中): 具有执行故障检测和程序功能的组管理系统的服务器设备
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Application No.: US12300015Application Date: 2007-04-24
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Publication No.: US08355808B2Publication Date: 2013-01-15
- Inventor: Takumi Inokawa , Noriaki Koyama
- Applicant: Takumi Inokawa , Noriaki Koyama
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JP2006-129729 20060509
- International Application: PCT/JP2007/058791 WO 20070424
- International Announcement: WO2007/129567 WO 20071115
- Main IPC: G06F17/00
- IPC: G06F17/00

Abstract:
It is possible to compose a chart by filtering measurement information using a product wafer number in a server device including: an instruction receiving unit for storing therein plural measurement information, which is time sequential information measured in a plurality of manufacturing apparatuses and has a product wafer number and time information, and for receiving an output instruction of a chart containing the product wafer number; a fault detection unit for, when the instruction receiving unit receives the output instruction, reading a multiplicity of measurement information satisfying a product wafer number condition contained in the output instruction, and determining whether the read multiplicity of measurement information satisfies the condition information; an output information composing unit for composing the output information according to a determination result of the fault detection unit; and an output unit for outputting the output information composed by the output information composing unit.
Public/Granted literature
- US20090177308A1 SERVER AND PROGRAM Public/Granted day:2009-07-09
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