Invention Grant
US08355808B2 Server device of group management system having function of performing fault detection and program 有权
具有执行故障检测和程序功能的组管理系统的服务器设备

  • Patent Title: Server device of group management system having function of performing fault detection and program
  • Patent Title (中): 具有执行故障检测和程序功能的组管理系统的服务器设备
  • Application No.: US12300015
    Application Date: 2007-04-24
  • Publication No.: US08355808B2
    Publication Date: 2013-01-15
  • Inventor: Takumi InokawaNoriaki Koyama
  • Applicant: Takumi InokawaNoriaki Koyama
  • Applicant Address: JP Tokyo
  • Assignee: Tokyo Electron Limited
  • Current Assignee: Tokyo Electron Limited
  • Current Assignee Address: JP Tokyo
  • Agency: Pearne & Gordon LLP
  • Priority: JP2006-129729 20060509
  • International Application: PCT/JP2007/058791 WO 20070424
  • International Announcement: WO2007/129567 WO 20071115
  • Main IPC: G06F17/00
  • IPC: G06F17/00
Server device of group management system having function of performing fault detection and program
Abstract:
It is possible to compose a chart by filtering measurement information using a product wafer number in a server device including: an instruction receiving unit for storing therein plural measurement information, which is time sequential information measured in a plurality of manufacturing apparatuses and has a product wafer number and time information, and for receiving an output instruction of a chart containing the product wafer number; a fault detection unit for, when the instruction receiving unit receives the output instruction, reading a multiplicity of measurement information satisfying a product wafer number condition contained in the output instruction, and determining whether the read multiplicity of measurement information satisfies the condition information; an output information composing unit for composing the output information according to a determination result of the fault detection unit; and an output unit for outputting the output information composed by the output information composing unit.
Public/Granted literature
Information query
Patent Agency Ranking
0/0