Invention Grant
US08356407B2 Method of releasing high temperature films and/or devices from metallic substrates 失效
从金属基板释放高温膜和/或器件的方法

Method of releasing high temperature films and/or devices from metallic substrates
Abstract:
Films and electronic devices can be released from metallic substrates by: (i) applying a coating of a polysilsesquioxane resin to a metallic substrate, (ii) heating the coated metallic substrate to a temperature sufficient to cure the polysilsesquioxane resin, (iii) applying a polymeric film to the cured coating on the metallic substrate, (iv) further heating the coated metallic substrate to a temperature sufficient to cure the polymeric film, (v) optionally fabricating electronic devices on the polymeric film, and (vi) releasing the polymeric film from the metallic substrate.
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