Invention Grant
US08356494B2 Process for producing porous quartz glass object, and optical member for EUV lithography 失效
用于生产多孔石英玻璃物体的方法和用于EUV光刻的光学构件

Process for producing porous quartz glass object, and optical member for EUV lithography
Abstract:
A process for producing a porous quartz glass body containing hydrolyzing a metal dopant precursor and an SiO2 precursor in a flame of a burner to form glass fine particles, and depositing and growing the formed glass fine particles on a base material, in which the burner has at least two nozzles, and in which a mixed gas containing (A) a metal dopant precursor gas, (B) an SiO2 precursor gas, (C) one gas of H2 and O2, and (D) one or more gases selected from the group consisting of a rare gas, N2, CO2, a hydrogen halide and H2O, with a proportion of the gas (D) being from 5 to 70 mol %; and (E) the other gas of H2 and O2 of (C), are fed into different nozzles of the burner from each other.
Information query
Patent Agency Ranking
0/0