Invention Grant
- Patent Title: Mass flow meter and mass flow controller
- Patent Title (中): 质量流量计和质量流量控制器
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Application No.: US12625366Application Date: 2009-11-24
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Publication No.: US08356623B2Publication Date: 2013-01-22
- Inventor: Yasuhiro Isobe , Osamu Horinouchi , Yuki Tanaka , Masao Yamaguchi , Yukimasa Furukawa
- Applicant: Yasuhiro Isobe , Osamu Horinouchi , Yuki Tanaka , Masao Yamaguchi , Yukimasa Furukawa
- Applicant Address: JP Kyoto-shi
- Assignee: Horiba STEC, Co., Ltd.
- Current Assignee: Horiba STEC, Co., Ltd.
- Current Assignee Address: JP Kyoto-shi
- Agency: Alleman Hall McCoy Russell & Tuttle LLP
- Priority: JP2008-331541 20081225; JP2009-264271 20091119
- Main IPC: F16K31/00
- IPC: F16K31/00

Abstract:
In order to improve a measurement accuracy of a mass flow meter, the mass flow meter comprises a flow rate calculating section that obtains an output signal from a sensor section having a thermosensitive resistive element arranged in a flow channel where a sample gas flows and that calculates a flow rate of the sample gas, a pressure measuring section that measures a primary side pressure in the flow channel, and a flow rate correcting section that corrects the measured flow rate obtained by the flow rate calculating section by the use of the primary side pressure obtained by the pressure measuring section and a gas coefficient determined by an isobaric specific heat of the sample gas.
Public/Granted literature
- US20100163119A1 MASS FLOW METER AND MASS FLOW CONTROLLER Public/Granted day:2010-07-01
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