Invention Grant
US08356887B2 Piezoelectric element, and liquid ejection head and recording apparatus using the piezoelectric element 有权
压电元件和液体喷射头以及使用该压电元件的记录装置

Piezoelectric element, and liquid ejection head and recording apparatus using the piezoelectric element
Abstract:
Provided are a piezoelectric element that can effectively utilize a piezoelectric constant d15 to increase a deflection displacement of a vibrating plate, and devices using the piezoelectric element. The piezoelectric element includes: a first electrode; a second electrode; a vibrating plate that is in contact with the first electrode; a piezoelectric film provided between the first electrode and the second electrode; at least one recess formed on the second electrode side of the piezoelectric film; and a third electrode formed on an inner side wall of the at least one recess, in which the third electrode is connected to the second electrode.
Information query
Patent Agency Ranking
0/0