Invention Grant
- Patent Title: Exhaust pump, communicating pipe, and exhaust system
- Patent Title (中): 排气泵，连通管和排气系统
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Application No.: US12053819Application Date: 2008-03-24
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Publication No.: US08356970B2Publication Date: 2013-01-22
- Inventor: Eiichi Sugawara , Tsuyoshi Moriya
- Applicant: Eiichi Sugawara , Tsuyoshi Moriya
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2007-085430 20070328
- Main IPC: F04D5/00
- IPC: F04D5/00 ; F04D19/04 ; F04D29/70
Abstract:
An exhaust pump that prevents particles from entering a processing chamber of a substrate processing apparatus. The exhaust pump connected to the processing chamber has rotary blades and an air intake portion disposed on the processing chamber side of the rotary blades. A shielding unit is disposed inside the air intake portion and shields the rotary blades when the air intake portion is viewed from the processing chamber side.
Public/Granted literature
- US20080240905A1 EXHAUST PUMP, COMMUNICATING PIPE, AND EXHAUST SYSTEM Public/Granted day:2008-10-02
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