Invention Grant
- Patent Title: Crystalline film devices, apparatuses for and methods of fabrication
-
Application No.: US12111126Application Date: 2008-04-28
-
Publication No.: US08357242B2Publication Date: 2013-01-22
- Inventor: Russell F. Jewett , Steven F. Pugh , Paul Wickboldt
- Applicant: Russell F. Jewett , Steven F. Pugh , Paul Wickboldt
- Agency: Williams IPS
- Agent Larry Williams
- Main IPC: C30B23/00
- IPC: C30B23/00 ; C30B25/00 ; C30B28/12 ; C30B28/14
Abstract:
Methods of depositing thin film materials having crystalline content are provided. The methods use plasma enhanced chemical vapor deposition. According to one embodiment of the present invention, microcrystalline silicon films are obtained. According to a second embodiment of the present invention, crystalline films of zinc oxide are obtained. According to a third embodiment of the present invention, crystalline films of iron oxide are obtained.
Public/Granted literature
- US20090017601A1 CRYSTALLINE FILM DEVICES, APPARATUSES FOR AND METHODS OF FABRICATION Public/Granted day:2009-01-15
Information query
