Invention Grant
- Patent Title: Method for testing group III-nitride wafers and group III-nitride wafers with test data
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Application No.: US12456181Application Date: 2009-06-12
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Publication No.: US08357243B2Publication Date: 2013-01-22
- Inventor: Tadao Hashimoto , Masanori Ikari , Edward Letts
- Applicant: Tadao Hashimoto , Masanori Ikari , Edward Letts
- Applicant Address: US CA Buellton
- Assignee: Sixpoint Materials, Inc.
- Current Assignee: Sixpoint Materials, Inc.
- Current Assignee Address: US CA Buellton
- Agency: K&L Gates LLP
- Main IPC: C30B23/00
- IPC: C30B23/00 ; C30B25/00 ; C30B28/12 ; C30B28/14

Abstract:
The present invention discloses a new testing method of group III-nitride wafers. By utilizing the ammonothermal method, GaN or other Group III-nitride wafers can be obtained by slicing the bulk GaN ingots. Since these wafers originate from the same ingot, these wafers have similar properties/qualities. Therefore, properties of wafers sliced from an ingot can be estimated from measurement data obtained from selected number of wafers sliced from the same ingot or an ingot before slicing. These estimated properties can be used for product certificate of untested wafers. This scheme can reduce a significant amount of time, labor and cost related to quality control.
Public/Granted literature
- US20090315151A1 Method for testing group III-nitride wafers and group III-nitride wafers with test data Public/Granted day:2009-12-24
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